Broadband Ellipsometer Or Polarimeter System Including at Least One Multiple Element Lens

Rotating or Rotatable Compensator Spectroscopic Ellipsometer System Including Multiple Element Lenses

Compact ellipsometer employing a static polarimeter module with arrayed polarizer and wave-plate elements.

A portable ellipsometer with a compact static polarimeter using an arrayed polarizer, an arrayed wave plate, and a CCD image sensor is developed. A high level of repeatability at a measurement speed of 0.3 s is demonstrated by measurement of SiO(2) films ranging from 2 to 300 nm in thickness deposited on an Si wafer. There is the potential to realize an ultracompact ellipsometer module by integ...

Spectroscopic Ellipsometer and Polarimeter Systems

Combined Spatial Filter and Relay Systems in Rotating Compensator Ellipsometer/Polimeter

Liphardt et al. (*) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days. This patent is subject to a terminal dis-claimer. ABSTRACT Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.

Broadband, high spectral resolution 2-D wavelength-parallel polarimeter for Dense WDM systems.

A broadband wavelength-parallel polarimeter has been designed or polarization measurements of multiple Dense WDM channels in parallel, which is based on a 2-D spectral disperser via a diffraction grating and a virtually-imaged phased-array (VIPA). At a hyperfine 2.8 GHz sub-channel spacing, we have demonstrated spectral polarization measurements of ~1500 sub-channels (~32 nm spectral range), wi...